Experimental determination of mass sensitivity of APM sensors by CVD thin films

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1994, Pages 629-632

  Schumacher, J ^a   Dahint, R ^a   Josse, F ^a   Grunze, M ^a  

^a UNIVERSITY OF HEIDELBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; ELECTRODES; FREQUENCIES; HEAT RESISTANCE; LITHIUM COMPOUNDS; PHASE MEASUREMENT; QUARTZ; SENSITIVITY ANALYSIS; SENSORS; THICKNESS MEASUREMENT; THIN FILMS;

ACOUSTIC PLATE MODES; CORROSIVE ANALYTES; FREQUENCY DEPENDENCE; GRAVIMETRICAL SENSORS; LIQUID PHASE MEASUREMENT; MASS SENSITIVITY; METALLIZATION THICKNESS; PYROMELLITIC DIANHYDRIDE; QUARTZ CRYSTAL MICROBALANCE;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0028730457     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ultsym.1994.401665     Document Type: Conference Paper

References (7)