Composition, structure and tribological properties of amorphous carbon nitride coatings

Surface and Coatings Technology

Volumn 68-69, Issue C, 1994, Pages 611-615

  Li, Dong ^a   Cutiongco, Eric ^a   Chung, Yip Wah ^a   Wong, Ming Show ^a   Sproul, William D ^a  

^a NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; AMORPHOUS MATERIALS; CARBON INORGANIC COMPOUNDS; COMPOSITION; GRAPHITE; MICROSCOPIC EXAMINATION; SPUTTERING; STEEL; SYNTHESIS (CHEMICAL); TEMPERATURE; TRIBOLOGY; X RAY DIFFRACTION;

CARBON NITRIDE COATINGS; LASER ABLATION TECHNIQUE; SPUTTERING GRAPHITE; UNBALANCED MAGNETRON SPUTTERING;

COATINGS;

CARBONITRIDING; COATINGS;

EID: 0028729965     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/0257-8972(94)90225-9     Document Type: Article

References (23)

1. Carbon-Nitrogen Pyrolyzates: Attempted Preparation of Carbon Nitride
2. Properties of carbon nitride thin films prepared by ion and vapor deposition
3. Infrared absorption and nuclear magnetic resonance studies of carbon nitride thin films prepared by reactive magnetron sputtering
4. Metal ion deposition from ionized mangetron sputtering discharge