SAW humidity sensor using dielectric hygroscopic polymer film

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1994, Pages 503-506

  Nomura, T ^a   Oofuchi, K ^a   Yasuda, T ^a   Furukawa, S ^a  

^a SHIBAURA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE VELOCITY; ATMOSPHERIC HUMIDITY; CELLULOSE DERIVATIVES; DELAY CIRCUITS; DIELECTRIC FILMS; ELECTRIC FIELDS; HYSTERESIS; LITHIUM COMPOUNDS; MECHANICAL PROPERTIES; PERMITTIVITY; PIEZOELECTRIC MATERIALS; SENSORS;

CELLULOSE ACETATE; HUMIDITY SENSOR; HYGROSCOPIC POLYMER FILM; LINEARITY; LITHIUM NIOBATE; RELATIVE HUMIDITY; RESPONSE TIME (SENSORS); SENSITIVITY;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0028729881     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ultsym.1994.401638     Document Type: Conference Paper

References (5)