X-ray diffraction determination of the effect of passivations on stress in patterned lines of tungsten

Materials Research Society Symposium - Proceedings

Volumn 338, Issue , 1994, Pages 241-246

  Maniguet, L ^a   Ignat, M ^a   Dupeux, M ^a   Bacmann, J J ^a   Normandon, Ph ^a  

^a UNIV GRENOBLE ALPES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; METALLIC FILMS; PASSIVATION; RESIDUAL STRESSES; STRAIN; STRESS ANALYSIS; SUBSTRATES; X RAY ANALYSIS;

PATTERNED TUNGSTEN LINES; X RAY DIFFRACTION;

TUNGSTEN;

EID: 0028727125     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-338-241     Document Type: Conference Paper

References (10)