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Volumn , Issue , 1994, Pages 543-546
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Structural and acoustic properties of sputtered aluminum nitride on silicon
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC PROPERTIES;
ACOUSTIC VARIABLES MEASUREMENT;
ACOUSTIC WAVE PROPAGATION;
ATOMIC FORCE MICROSCOPY;
CHEMICAL VAPOR DEPOSITION;
EPITAXIAL GROWTH;
SILICON WAFERS;
SPUTTER DEPOSITION;
STRUCTURE (COMPOSITION);
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY CRYSTALLOGRAPHY;
BULK ACOUSTIC WAVE;
HIGH DEPOSITION RATE;
INTERDIGITAL ELECTRODE TRANSDUCER;
LOW BACKGROUND SPUTTER TEMPERATURE;
PROPAGATION LOSSES;
SINGLE CRYSTAL DIFFRACTION PATTERN;
SPUTTERED ALUMINUM NITRIDE;
SURFACE ACOUSTIC WAVE PROPAGATION MEASUREMENT;
NITRIDES;
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EID: 0028721855
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (13)
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References (9)
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