Characterization of sputter-deposited (Ba, Sr)TiO3 thin films on the sidewalls of fine-patterned electrodes

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 1994, Pages 74-77

  Yamamichi, Shintaro ^a   Takemura, Koichi ^a   Sakuma, Toshiyuki ^a   Watanabe, Hirohito ^a   Ono, Haruhiko ^a   Tokashiki, Ken ^a   Ikawa, Eiji ^a   Miyasaka, Yoichi ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; CRYSTALLIZATION; CYCLOTRON RESONANCE; DIELECTRIC PROPERTIES; ELECTRODES; ELECTRON MICROSCOPY; ELECTRON RESONANCE; GRAIN SIZE AND SHAPE; LEAKAGE CURRENTS; PLASMA ETCHING; RUTHENIUM COMPOUNDS; SPUTTER DEPOSITION;

BARIUM STRONTIUM TITANATE; RUTHENIUM OXIDE; SUBMICRON SIZES;

THIN FILMS;

EID: 0028717388     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)