Line-width dependence of stress in passivated Al lines during thermal cycling

Materials Research Society Symposium - Proceedings

Volumn 338, Issue , 1994, Pages 261-268

  Chidambarrao, D ^a   Rodbell, K P ^a   Thouless, M D ^a   DeHaven, P W ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CURVE FITTING; FINITE ELEMENT METHOD; HYSTERESIS; MATHEMATICAL MODELS; PASSIVATION; PLASTICITY; SEMICONDUCTING SILICON; STRESS ANALYSIS; SUBSTRATES; THERMAL EFFECTS; X RAY ANALYSIS;

ALUMINUM BLANKET FILMS; LINE WIDTH; THERMAL CYCLING;

METALLIC FILMS;

EID: 0028715273     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-338-261     Document Type: Conference Paper

References (23)