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Volumn , Issue , 1994, Pages 547-550
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Electrical properties of PZT thin films with Ir and IrO2 electrodes
a
a
ROHM CO LTD
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
CAPACITORS;
ELECTRIC PROPERTIES;
ELECTRODES;
FATIGUE OF MATERIALS;
FERROELECTRIC MATERIALS;
HEAT RESISTANCE;
IRIDIUM;
OXIDES;
PEROVSKITE;
POLARIZATION;
SOL-GELS;
CONTINUOUS POLARIZATION;
DIFFUSION BARRIERS;
FATIGUE PROPERTIES;
FERROELECTRIC THIN FILMS;
IRIDIUM OXIDES ELECTRODES;
LEAD ZIRCONATE TITANATE;
POLYCRYSTALLINE SILICON;
SOL-GEL METHOD;
SWITCHING PULSE;
THIN FILMS;
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EID: 0028705095
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (5)
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References (5)
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