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Volumn 4, Issue 4, 1994, Pages 217-226
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Travelling wave-driven microfabricated electrohydrodynamic pumps for liquids
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Author keywords
[No Author keywords available]
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Indexed keywords
CLOSED PUMP SYSTEMS;
HIGH FREQUENCY TRAVELLING WAVE DRIVEN PUMPS;
SEMICONDUCTOR TECHNOLOGY;
THREE DIMENSIONAL COMPONENTS;
ELECTRIC CONDUCTIVITY;
ELECTRIC FIELD EFFECTS;
FLUIDS;
MICROELECTROMECHANICAL DEVICES;
PERMITTIVITY;
SEMICONDUCTOR DEVICE MANUFACTURE;
SYSTEMS ANALYSIS;
PUMPS;
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EID: 0028695874
PISSN: 09601317
EISSN: None
Source Type: Journal
DOI: 10.1088/0960-1317/4/4/007 Document Type: Article |
Times cited : (123)
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References (19)
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