Macroparticle-free TiN films prepared by arc ion-plating process

Surface and Coatings Technology

Volumn 68-69, Issue C, 1994, Pages 141-145

  Kang, G H ^a   Uchida, H ^a   Koh, E S ^a  

^a TOKAI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FILM PREPARATION; IMAGE ANALYSIS; NITRIDES; PARTICLES (PARTICULATE MATTER); PLATING; ROTATION; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; TITANIUM; TITANIUM NITRIDE; VELOCITY; VOLTAGE CONTROL;

ARC ION PLATING; CENTRIFUGAL EFFECT; SURFACE TOPOGRAPHY;

THIN FILMS;

ARC ION PLATING; COATINGS-CERAMIC; DEPOSITION; TITANIUM NITRIDE;

EID: 0028671193     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/0257-8972(94)90151-1     Document Type: Article

References (19)

1. Comparison of the steered arc and random arc techniques
2. Review of ion-based coating processes derived from the cathodic arc