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Volumn 30, Issue 6, 1994, Pages 4113-4115
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Tribological Behavior of Thin Film Rigid Disks with Regular Dot Array Texture on Carbon Overcoats
a a a a a
a
HITACHI LTD
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
ETCHING;
FRICTION;
MAGNETIC THIN FILMS;
PHOTOLITHOGRAPHY;
SPUTTERING;
SUBSTRATES;
TEXTURES;
CONCENTRIC CIRCULAR TEXTURE;
DC MAGNETRON SPUTTERING;
MAGNETIC DISK DRIVES;
REGULAR DOT ARRAY TEXTURE;
MAGNETIC DISK STORAGE;
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EID: 0028550374
PISSN: 00189464
EISSN: 19410069
Source Type: Journal
DOI: 10.1109/20.334006 Document Type: Article |
Times cited : (29)
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References (4)
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