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Journal of Materials Science

Volumn 29, Issue 22, 1994, Pages 5953-5971

Anisotropic etching of silicon crystals in KOH solution - Part I Experimental etched shapes and determination of the dissolution slowness surface

(2) Tellier, C R a Brahim Bounab, A a

a Centre National de la Recherche Scientifique (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CRYSTALS; ETCHING; POTASSIUM COMPOUNDS; SOLUTIONS;

ANISOTROPIC ETCHING; POTASSIUM HYDROXIDE SOLUTIONS;

SILICON;

EID: 0028550078 PISSN: 00222461 EISSN: 15734803 Source Type: Journal
DOI: 10.1007/BF00366880 Document Type: Article

Times cited : (23)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.