Micromanufacturing benefits from excimer-laser development

Laser Focus World

Volumn 30, Issue 11, 1994, Pages

  Rebhan, Ulrich ^a   Endert, Heinrich ^a   Zaal, Gerard ^a  

^a Lambda Physik GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALLOYS; CERAMIC MATERIALS; ELECTRODES; HALOGEN ELEMENTS; HELIUM; INDUSTRIAL APPLICATIONS; MANUFACTURE; MEDICAL APPLICATIONS; NEON; PERFORMANCE; PLASMAS;

HIGH VOLTAGE CONTROL CIRCUIT; INTERNAL HALOGEN GENERATORS; LASER LIFETIME; MAGNETIC SWITCHING; METAL/CERAMIC LASER TUBES; MICROMANUFACTURING;

EXCIMER LASERS;

EID: 0028547561     PISSN: 07402511     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)