A small-size silicon microphone for measurements in turbulent gas flows

Sensors and Actuators: A. Physical

Volumn 45, Issue 2, 1994, Pages 103-108

  Kälvesten, Edvard ^a   Löfdahl, Lennart ^b   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

Silicon microphone; Turbulent gas flows

Indexed keywords

DIAPHRAGMS; EDDY CURRENTS; ETCHING; FLOW MEASUREMENT; FREQUENCY RESPONSE; MICROMACHINING; MICROPHONES; PRESSURE MEASUREMENT; PRESSURE TRANSDUCERS; STRAIN GAGES; TURBULENT FLOW;

SILICON MICROPHONE; TURBULENT GAS FLOWS;

SILICON SENSORS;

EID: 0028545274     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(94)00824-8     Document Type: Article

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