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Volumn 33, Issue 11B, 1994, Pages L1642-L1644

High spatial resolution elemental mapping of multilayers using a field emission transmission electron microscope equipped with an imaging filter

(4) Kimoto, Koji a Hirano, Tatsumi a Usami, Katsuhisa a Hoshiya, Hiroyuki a

a HITACHI LTD (Japan)

Author keywords

Electron energy loss spectroscopy (EELS); Energy filter; Field emission transmission electron microscope (FE TEM); Imaging filter; Multilayer; X ray reflectivity

Indexed keywords

CAMERAS; CHARGE COUPLED DEVICES; CHROMIUM; DIFFRACTOMETERS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRONS; IONS; MAGNETRON SPUTTERING; MULTILAYERS; THICKNESS MEASUREMENT;

CHARGE COUPLED DEVICE CAMERA; CHROMIUM MAPPING; ENERGY FILTER; ENERGY LOSS SPECTRA; HIGH SPATIAL RESOLUTION ELEMENTAL MAPPING; IMAGING FILTER; ION MILLING; NANOMETERS; SCANNING TRANSMISSION ELECTRON MICROSCOPY; X RAY REFLECTIVITY;

TRANSMISSION ELECTRON MICROSCOPY;

EID: 0028539980 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.33.L1642 Document Type: Article

Times cited : (17)

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