Suppression of cone formation on carbon target during sputtering

Japanese Journal of Applied Physics

Volumn 33, Issue 9 R, 1994, Pages 4991-4996

  Hoshi, Yoichi ^c   Suzuki, Atsushi ^a   Judy, Jack H ^b  

^a KAO CORPORATION   (Japan)

^b UNIVERSITY OF MINNESOTA   (United States)

^c TOKYO POLYTECHNIC UNIVERSITY   (Japan)

Author keywords

Cone formation; Diamondlike carbon film; Glasslike carbon; Sputtering; Whisker

Indexed keywords

AMORPHOUS FILMS; CARBON; CRYSTAL GROWTH; CRYSTAL WHISKERS; ELECTRON EMISSION; GRAPHITE; THIN FILMS;

CARBON THIN FILM; CONE FORMATION; FACING TARGET SPUTTERING (FTS); GLASSLIKE CARBON; WHISKER GROWTH;

SPUTTER DEPOSITION;

EID: 0028513204     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.33.4991     Document Type: Article

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