Preparation of Pb(Zr, Ti)O3 thin films on Ir and IrO2 electrodes

Japanese Journal of Applied Physics

Volumn 33, Issue 9 S, 1994, Pages 5207-5210

  Nakamura, Takashi ^a   Nakao, Yuichi ^a   Kamisawa, Akira ^a   Takasu, Hidemi ^a  

^a ROHM CO LTD   (Japan)

Author keywords

Conductive oxide; Fatigue property; Ferroelectric thin films; Ir; IrO2; Pb(Zi; Sol gel method; Ti)O3

Indexed keywords

ANNEALING; CONDUCTIVE FILMS; ELECTRODES; FATIGUE OF MATERIALS; FILM GROWTH; FILM PREPARATION; IRIDIUM COMPOUNDS; LEAD COMPOUNDS; OXIDES; PEROVSKITE; SOL-GELS; THIN FILMS;

LEAD ZIRCONATE TITANATE;

FERROELECTRIC MATERIALS;

EID: 0028512460     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.33.5207     Document Type: Article

References (5)

1. C. K. Kwok, D. P. Vijay, S. B. Desu, N. R. Parikh and E. A. Hill: Proc. 4th Int. Symp. Integrated Ferroelectrics, Col­orado Springs, 1992, p. 412.
2. K. R. Bellur, H. N. Al-Shareef, S. H. Rou, K. D. Gifford, O. Auciello and A. I. Kingon: Proc. 8th IEEE Int. Symp. Appli­cations of Ferroelectrics, Greenville, 1992 (IEEE, Piscataway, 1992) p. 448.
3. R. Ramesh, W. K. Chan, H. Gilchrist, B. Wilkens, T. Sands, J. M. Tarascon, V. G. Keramidas, J. T. Evans Jr, F. D. Gealy and D. K. Fork: Mater. Res. Soc. Symp. Proc. 243 (1992) 477.
4. J. T. Cheung, P. E. D. Morgan and R. Neurgaonkar: Proc. 4th Int. Symp. Integrated Ferroelectrics, Colorado Springs, 1992, p. 518.
5. K. Sameshima, T. Nakamura, K. Hoshiba, Y. Nakao, A. Kami- sawa, T. Atsuki, N. Soyama and K. Ogi: Jpn. J. Appl. Phys. 32 (1993) 4144.