Surface morphology of lead-based thin films and their properties

Japanese Journal of Applied Physics

Volumn 33, Issue 9 S, 1994, Pages 5196-5200

  Atsuki, Tsutomu ^a   Soyama, Nobuyuki ^a   Sasaki, Go ^a   Yonezawa, Tadashi ^a   Ogi, Katsumi ^a   Sameshima, Katsumi ^b   Hoshiba, Kazuhiro ^b   Nakao, Yuichi ^b   Kamisawa, Akira ^b  

^a MITSUBISHI MATERIALS CORPORATION   (Japan)

^b ROHM CO LTD   (Japan)

Author keywords

Ferroelectric; PZT; Sol gel; Surface morphology; Thin films

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; CRYSTAL STRUCTURE; ELECTRON DIFFRACTION; LEAD COMPOUNDS; MORPHOLOGY; PEROVSKITE; SOL-GELS; SUBSTRATES; SURFACES; THIN FILMS; X RAY SPECTROSCOPY;

ENERGY DISPERSIVE X RAY SPECTROSCOPY; LEAD ZIRCONATE TITANATE;

FERROELECTRIC MATERIALS;

EID: 0028509953     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.33.5196     Document Type: Article

References (11)

1. J. F. Scott and C. A. Araujo: Science 246 (1989) 973.
2. T. Okudaira, A. Hachisuka, N. Soyama, K. Ogi, H. Arima, T. Matsukawa and K. Horie: Ext. Abstr. Int. Conf. Sold State Devices and Materials, Yokohama 1991 (Business Center for Academic Societies Japan, Tokyo, 1991) p. 204.
3. N. Nagao, T. Takeuchi and K. Iijima: Jpn. J. Appl. Phys. 32 (1993) 4065.
4. M. Okada and K. Tomonaga: J. Appl. Phys. 71 (1992) 1995.
5. H. Kidoh, T. Ogawai, H. Yashima, A. Morimoto and T. Shimizu: Jpn. J. Appl. Phys. 31 (1992) 2965.
6. K. D. Buud, S. K. Dey and D. A. Payne: Br. Ceram. Proc. 36 (1985) 107.
7. J. B. Blum and S. R. Gurkovich: J. Mater. Sci. 20 (1985) 4479.
8. G. Yi, Z. Wu and M. Sayer: J. Appl. Phys. 64 (1989) 2717.
9. L. E. Sanchez, S. Y. Wu and I. K. Naik: Appl. Phys. Lett. 56 (1988) 2399.
10. L. N. Chapin and S. A. Myers: Mater. Res. Soc. Symp. Proc. 200 (1990) 153.
11. Y. Matsuno and H. Sasaki: J. Am. Ceram. Soc. 48 (1965) 289.