Synthesizing and processing conducting polythiophene derivatives for charge dissipation in electron-beam lithography

Polymer

Volumn 35, Issue 19, 1994, Pages 4057-4064

  Huang, Wu Song ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

conducting polymers; polythiophene derivatives; synthesis

Indexed keywords

ACIDS; COATINGS; CONDUCTIVE PLASTICS; DERIVATIVES; ELECTRIC CHARGE; ELECTRON BEAM LITHOGRAPHY; ENERGY DISSIPATION; PHOTORESISTS; PLASTIC FILMS; SALTS; SYNTHESIS (CHEMICAL); TOLUENE;

POLYTHIOPHENE DERIVATIVES;

FURAN RESINS;

EID: 0028498898     PISSN: 00323861     EISSN: None     Source Type: Journal    
DOI: 10.1016/0032-3861(94)90575-4     Document Type: Article

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