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Volumn 116, Issue 3, 1994, Pages 171-176

Approximate evaluation of the elastic thermal stresses in a thin film fabricated on a very thick circular substrate

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENTIAL EQUATIONS; LOADS (FORCES); MATHEMATICAL MODELS; SHEAR STRESS; STRAIN; STRESS ANALYSIS; SUBSTRATES; THERMAL STRESS;

EID: 0028495448     PISSN: 10437398     EISSN: 15289044     Source Type: Journal    
DOI: 10.1115/1.2905682     Document Type: Article
Times cited : (33)

References (13)
  • 3
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    • Luryi, S., and Suhir, E., 1986, “New Approach to the High Quality Epitaxial Growth of Lattice-Mismatched Materials,” Appl. Phys. Lett., Vol. 49, No. 3, pp. 140-142.
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    • Luryi, S.1    Suhir, E.2
  • 4
    • 0017504881 scopus 로고
    • Calculated Stresses in Multilayered Heteroepitaxial Structure
    • Olsen, G. H., and Ettenberg, M., 1977, “Calculated Stresses in Multilayered Heteroepitaxial Structure,” J. of Appl. Phys., Vol. 48, No. 6, pp. 2543-2547.
    • (1977) J. of Appl. Phys. , vol.48 , Issue.6 , pp. 2543-2547
    • Olsen, G.H.1    Ettenberg, M.2
  • 5
    • 0015650629 scopus 로고
    • Interface Stress of AlxGa]_xAs-GaAs Layer Structures
    • xAs-GaAs Layer Structures,” J. of Appl. Phys., Vol. 44, No. 7, pp. 3171-3175.
    • (1973) J. of Appl. Phys. , vol.44 , Issue.7 , pp. 3171-3175
    • Reinhart, F.K.1    Logan, R.A.2
  • 6
    • 0016974517 scopus 로고
    • Analysis of Stresses and Strain Distribution in Thin Films and Substrates
    • Röll, K., 1976, “Analysis of Stresses and Strain Distribution in Thin Films and Substrates,” J. of Appl. Phys., Vol. 47, No. 7, pp. 3224-3229.
    • (1976) J. of Appl. Phys. , vol.47 , Issue.7 , pp. 3224-3229
    • Röll, K.1
  • 8
    • 0000073841 scopus 로고
    • The Tension of Metallic Films Deposited by Electrolysis
    • London
    • Stoney, G. G., 1909, “The Tension of Metallic Films Deposited by Electrolysis,” Royal Soc. Proc., A82, London, pp. 172-175.
    • (1909) Royal Soc. Proc , vol.A82 , pp. 172-175
    • Stoney, G.G.1
  • 9
    • 0022787978 scopus 로고
    • Stresses in Bi-Metal Thermostats, ASME
    • Suhir, E., 1986, “Stresses in Bi-Metal Thermostats,” ASME Journal of Applied Mechanics, Vol. 53, pp. 657-660.
    • (1986) Journal of Applied Mechanics , vol.53 , pp. 657-660
    • Suhir, E.1
  • 10
    • 0023984412 scopus 로고
    • An Approximate Analysis of Stresses in Multilayered Elastic Thin Films, ASME
    • Suhir, E., 1988, “An Approximate Analysis of Stresses in Multilayered Elastic Thin Films,” ASME Journal of Applied Mechanics, Vol. 55, pp. 143-148.
    • (1988) Journal of Applied Mechanics , vol.55 , pp. 143-148
    • Suhir, E.1
  • 11
    • 0024734854 scopus 로고
    • Interfacial Stresses in Bi-Metal Thermostats, ASME
    • Suhir, E., 1989, “Interfacial Stresses in Bi-Metal Thermostats,” ASME Journal of Applied Mechanics, Vol. 56, pp. 595-600.
    • (1989) Journal of Applied Mechanics , vol.56 , pp. 595-600
    • Suhir, E.1
  • 12
    • 0025792489 scopus 로고
    • Approximate Evaluation of the Elastic Interfacial Stresses in Thin Films With Application to High-Tc Superconductive Ceramics
    • Suhir, E., 1991, “Approximate Evaluation of the Elastic Interfacial Stresses in Thin Films With Application to High-Tc Superconductive Ceramics,” Int. J. of Sol. Struc., Vol. 27, No. 8, pp. 1025-1034.
    • (1991) Int. J. of Sol. Struc. , vol.27 , Issue.8 , pp. 1025-1034
    • Suhir, E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.