Gas-Phase Precursors to Diamond and the sp2 Carbon Impurity

Journal of the Electrochemical Society

Volumn 141, Issue 8, 1994, Pages 2161-2165

  Johnson, Curtis E ^a   Weimer, Wayne A ^a  

^a NAVAL AIR WARFARE CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; AGENTS; CHEMICAL REACTORS; CHEMICAL VAPOR DEPOSITION; CURVE FITTING; FILM GROWTH; IMPURITIES; MASS SPECTROMETRY; METHANE; MOLECULAR STRUCTURE; RAMAN SPECTROSCOPY; SURFACES;

CARBON-13; DIAMOND FILM; GAS PHASE PRECURSORS; MICROWAVE PLASMA REACTOR;

SYNTHETIC DIAMONDS;

EID: 0028486065     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2055079     Document Type: Article

References (18)

1. F. G. Celii and J. E. Butler, Annu. Rev. Phys. Chem., 42, 643 (1991).
2. C. E. Johnson, W. A. Weimer, and F. M. Cerio, J. Mater. Res., 7, 1427 (1992).
3. S. J. Harris and L. R. Martin, J. Mater. Res., 5, 2313 (1990), and references therein. This paper briefly reviews the literature
4. L. R. Martin and M. W. Hill, J. Mater. Sci. Lett., 9, 621 (1990).
5. M. P. D'Evelyn, C. J. Chu, R. H. Hauge, and J. L. Margrave, J. Appl. Phys., 71, 1528 (1992).
6. W. A. Yarbrough, K. Tankala, and T. DebRoy, J. Mater. Res., 7, 379 (1992).
7. S. J. Harris and A. M. Weiner, Thin Solid Films, 212, 201 (1992).
8. D. S. Knight and W. B. White, J. Mater. Res., 4, 385 (1989).
9. A preliminary account of this work has been reported: C. E. Johnson and W. A. Weimer, in Proceedings of the Third International Symposium on Diamond Materials, J. P. Dismukes and K. V. Ravi, Editors, PV 93–17, p. 34, The Electrochemical Society Proceedings Series, Pennington, NJ (1993).
10. W. A. Weimer, F. M. Cerio, and C. E. Johnson, J. Mater. Res., 6, 2134 (1991).
11. W. F. Banholzer and T. R. Anthony, Thin Solid Films, 212, 1 (1992).
12. J. Warnatz, in Combustion Chemistry, W. C. Gardiner, Jr., Editor, p. 203, Springer-Verlag, New York (1984).
13. R. J. Kee, J. A. Miller, and G. H. Evans, Twenty-Second Symposium (International) on Combustion, p. 1479, The Combustion Institute, Pittsburgh, PA (1988).
14. W. Hsu, J. Appl. Phys., 72, 3102 (1992).
15. L. R. Martin, J. Mater. Sci. Lett., 12, 246 (1993).
16. C. E. Johnson and W. A. Weimer, in Diamond Optics V, A. Feldman and S. Holly, Editors, Proc. SPIE, 1759, 36, San Diego, CA (1992).
17. L. H. Robbins, A. Feldman, and E. N. Farabaugh, Proc. SPIE, p. 70.
18. M. H. Loh and M. A. Cappelli, in Proceedings of the Third International Symposium on Diamond Materials, J. P. Dismukes and K. V. Ravi, Editors, PV 93–17, p. 17, The Electrochemical Society Proceedings Series, Pennington, NJ (1993).