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Volumn 141, Issue 8, 1994, Pages 2231-2234
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A New Hydrogen Sensor Using a Polycrystalline Diamond-Based Schottky Diode
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Author keywords
[No Author keywords available]
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Indexed keywords
ADSORPTION;
CHEMICAL VAPOR DEPOSITION;
HYDROGEN;
PALLADIUM;
PRESSURE EFFECTS;
REACTION KINETICS;
SCHOTTKY BARRIER DIODES;
SEMICONDUCTING DIAMONDS;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR DOPING;
SUBSTRATES;
THERMAL EFFECTS;
ACTIVATION ENERGY;
BARRIER HEIGHT;
HYDROGEN PARTIAL PRESSURE;
HYDROGEN SENSOR;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
POLYCRYSTALLINE DIAMOND BASED SCHOTTKY DIODE;
GAS SENSING ELECTRODES;
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EID: 0028482907
PISSN: 00134651
EISSN: 19457111
Source Type: Journal
DOI: 10.1149/1.2055094 Document Type: Article |
Times cited : (51)
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References (12)
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