Single-Wafer Cluster Tool Performance: An Analysis of Throughput

IEEE Transactions on Semiconductor Manufacturing

Volumn 7, Issue 3, 1994, Pages 369-373

  Perkinson, Terry L ^a   McLarty, Peter K ^a   Gyurcsik, Ronald S ^a   Cavin, Ralph K ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN AIDS; MODIFICATION; PRODUCT DESIGN; SEMICONDUCTOR DEVICE MODELS; SUBSTRATES;

CLUSTER TOOLS; DETERMINISTIC MODELS; THROUGHPUT ANALYSIS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0028481573     PISSN: 08946507     EISSN: 15582345     Source Type: Journal    
DOI: 10.1109/66.311340     Document Type: Article

References (5)

1. S. C. Wood and K. C. Saraswat, “The economic impact of single wafer multiprocessors,” SPIE Rapid Thermal and Related Processing Technique, vol. 1393, p. 36, 1990.
2. J. R. Hauser, N. A. Masnari, and M. A. Littlejohn, “Multistep Insitu single wafer processing,” in Proc. MRS, vol. 146, 1989, p. 15.
3. S. C. Wood and K. C. Saraswat, “Factors affecting the economic performance of cluster-based fabs,” in Proc. 3rd Int. Symp. U LSI Science and Technology, 1991, p. 551.
4. Atherton, Turner, and Pool, “Performance analysis of multiprocessor semiconductor manufacturing equipment,” in Proc. IEEE/SEMI Advanced Semiconductor Manufacturing Conf., 1990, p. 131.
5. Bergendahl and Horak, “Cluster processing for 16-Mb production,” in Proc. SPIE, vol. 1188, 1989, p. 86.