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Volumn 41, Issue 7, 1994, Pages 1303-1305

Hot-Electron Degradation in NMOSFET’s: Results from Temperature Anneal

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC CURRENTS; ELECTRIC NETWORK PARAMETERS; ELECTRIC RESISTANCE; ELECTRON TRANSPORT PROPERTIES; HOT CARRIERS; INTERFACES (MATERIALS); THERMAL EFFECTS;

EID: 0028466055     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.293364     Document Type: Article
Times cited : (7)

References (10)
  • 2
    • 0023292235 scopus 로고
    • Two-dimensional modeling of locally damaged short-channel MOSFET’s operating in the linear region
    • H. Haddara and S. Cristoloveanu, “Two-dimensional modeling of locally damaged short-channel MOSFET’s operating in the linear region,” IEEE Trans. Electron Devices, vol. ED-34, p. 378, 1987.
    • (1987) IEEE Trans. Electron Devices , vol.ED-34 , pp. 378
    • Haddara, H.1    Cristoloveanu, S.2
  • 3
    • 0023293298 scopus 로고
    • Hot-canier-injected oxide region and hot-electron trapping as the main cause in Si nMOSFET degradation
    • T. Tsuchiya, T. Kobayashi, and S. Nakajima, “Hot-canier-injected oxide region and hot-electron trapping as the main cause in Si nMOSFET degradation,” IEEE Trans. Electron Devices, vol. ED-34, p. 386, 1987.
    • (1987) IEEE Trans. Electron Devices , vol.ED-34 , pp. 386
    • Tsuchiya, T.1    Kobayashi, T.2    Nakajima, S.3
  • 4
    • 0023451715 scopus 로고
    • Trapped-electron and generated interface-trap effects in hot-electron-induced MOSFET degradation
    • T. Tsuchiya, “Trapped-electron and generated interface-trap effects in hot-electron-induced MOSFET degradation,” IEEE Trans. Electron Devices, vol. ED-34, p. 2291, 1987.
    • (1987) IEEE Trans. Electron Devices , vol.ED-34 , pp. 2291
    • Tsuchiya, T.1
  • 5
    • 0026955620 scopus 로고
    • Characterization of charge trapping in submicrometer NMOSFET’s by gate capacitance measurements
    • C. H. Ling, Y. T. Yeow and L. K. Ah, “Characterization of charge trapping in submicrometer NMOSFET’s by gate capacitance measurements" IEEE Electron Device Lett., vol. 13, p. 587, 1992.
    • (1992) IEEE Electron Device Lett. , vol.13 , pp. 587
    • Ling, C.H.1    Yeow, Y.T.2    Ah, L.K.3
  • 6
    • 0027549846 scopus 로고
    • Logarithmic time dependence of PMOSFET degradation observed from gate capacitance
    • C. H. Ling, Y. T. Yeow, L. K. Ah, W. H. Yung, and W. K. Choi, “Logarithmic time dependence of PMOSFET degradation observed from gate capacitance,” Electronics Lett., vol. 29, p. 418, 1993.
    • (1993) Electronics Lett. , vol.29 , pp. 418
    • Ling, C.H.1    Yeow, Y.T.2    Ah, L.K.3    Yung, W.H.4    Choi, W.K.5
  • 7
    • 0025415052 scopus 로고
    • Spatial uniformity of interface trap distribution in MOSFET’s
    • N. S. Saks and M. G. Ancona, “Spatial uniformity of interface trap distribution in MOSFET’s,” IEEE Trans. Electron Devices, vol. 37, p. 1057, 1990.
    • (1990) IEEE Trans. Electron Devices , vol.37 , pp. 1057
    • Saks, N.S.1    Ancona, M.G.2
  • 9
    • 36749113463 scopus 로고
    • Characteristic electronic defects at the Si — SiO2. interface
    • N. M. Johnson, D. K. Biegelsen, M. D. Moyer, and S. T. Chang, “Characteristic electronic defects at the Si — SiO2. interface,” Appl. Phys. Lett., vol. 43, p. 563, 1983.
    • (1983) Appl. Phys. Lett. , vol.43 , pp. 563
    • Johnson, N.M.1    Biegelsen, D.K.2    Moyer, M.D.3    Chang, S.T.4
  • 10
    • 30844431996 scopus 로고
    • MOS interface states: overview and physicochemical perspective
    • E. H. Poindexter, “MOS interface states: overview and physicochemical perspective,” Semicond. Sci. Technol., vol. 4, p. 961, 1989.
    • (1989) Semicond. Sci. Technol. , vol.4 , pp. 961
    • Poindexter, E.H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.