Optical profilometry and its application to mechanically inaccessible surfaces Part I: Principles of focus error detection

Precision Engineering

Volumn 16, Issue 3, 1994, Pages 192-198

  Visscher, M ^a   Struik, K G ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

defect of focus system; focus error detection; optical profilometry; surface roughness measurement

Indexed keywords

DEFORMATION; ELASTOMERS; ERROR DETECTION; FOCUSING; GLASS; INTERFEROMETRY; LOADS (FORCES); OPTICAL DEVICES; OPTICAL VARIABLES MEASUREMENT; SCANNING; SURFACES; TESTING;

DEFECT OF FOCUS SYSTEM; FOCUS ERROR DETECTION; GLASS PLATE; OPTICAL PROFILOMETRY; TRANSPARENT LAYER;

ROUGHNESS MEASUREMENT;

EID: 0028465319     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/0141-6359(94)90124-4     Document Type: Article

References (12)

1. Optical profilometry and its application to mechanically inaccessible surfaces. Part II: application to elastomer/glass contacts
2. Development of a three-dimensional noncontact digital optical profiler
3. Comparison of the conformity of surface topography measured by optical and stylus instruments
4. Modern measurement techniques in surface metrology: part II: optical instruments
5. In-process sensors for surface roughness and their applications
6. Measurement of surface profiles by the focusing method
7. Read out of optical discs
8. Video disk player optics
9. Het meetsysteem van de AFM