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Materials Chemistry and Physics

Volumn 38, Issue 2, 1994, Pages 105-130

Channeling implants in silicon crystals

(5) Raineri, V a Privitera, V a Galvagno, G b Priolo, F c Rimini, E c

a CORIMME Stradale Primosole 50 I 95100 CataniaItaly ^*

b CNR IMETEM (Italy)

c UNIVERSITY OF CATANIA (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; ATOMS; BORON; CRYSTALS; DOSIMETRY; ENERGY DISSIPATION; MATHEMATICAL MODELS; MONTE CARLO METHODS; PHOSPHORUS; RADIATION DAMAGE; SILICON;

CHANNELING IMPLANTS; CHANNELING TAILS; ELECTRONIC STOPPING;

ION IMPLANTATION;

EID: 0028461497 PISSN: 02540584 EISSN: None Source Type: Journal
DOI: 10.1016/0254-0584(94)90001-9 Document Type: Review

Times cited : (16)

References (69)

1
- 0004126187
- John Wiley & Sons, New York
- (1985) Semiconductor devices
- Sze¹

2
- 0003679027
- Mc Graw-Hill, New York
- (1988) VLSI Technology
- Sze¹

3
- 84911321109
- February
- (1985) Solid State Techn. , pp. 163
- Turner¹ Current² Smith³ Crone⁴

4
- 0024607618
- (1989) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms , vol.37 B , pp. 357
- Westendorp¹

5
- 84911293991
- (1991) Nucl. Instr. and Meth. , vol.59-60 B , pp. 1061
- Yu¹ Chu² Patnaik³ Parikh⁴ Corcoran⁵ Kirschbaum⁶ Karahramyan⁷

6
- 84911327600
- Bologna
- (1987) Proc. of 17th European Solid State Device Research Conference ESSDERC
- La Ferla¹ Cannavó² Ferla³ Raineri⁴ Rimini⁵

7
- 0142111089
- (1990) Appl. Phys. Lett. , vol.56 , pp. 1254
- Kim¹ Lo² Kwong³ Tasch⁴ Novak⁵

8
- 0024606715
- (1989) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms , vol.37-38 B , pp. 365
- Chu¹ Numan² Zhang³ Landhy⁴ Michel⁵

9
- 36749105640
- (1981) J. Appl. Phys. , vol.52 , pp. 3985
- Wilson¹

10
- 0003495114
- J.F. Ziegler, Elsevier, Amsterdam
- (1992) Handbook of Ion Implantation Technology , pp. 414
- Simonton¹ Tasch²

11
- 84899422139
- (1963) Physical Review , vol.132 , pp. 1385
- Robinson¹ Oen²

12
- 4243870930
- (1963) Physical Review Letters , vol.10 , pp. 399
- Piery¹ Brown² Davies³ Cargo⁴

13
- 0004254621
- J. Wiley & Sons, New York
- (1973) Channeling
- Morgan¹

14
- 0001025545
- (1968) Canadian Journal of Physics , vol.46 , pp. 561
- Eisen¹

15
- 0003138003
- (1965) Dansk. Vid. Selk., Mat. Fys. Medd. , vol.34 , pp. 14
- Lindhard¹

16
- 36149019570
- (1961) Phys. Rev , vol.124 , pp. 128
- Lindhard¹ Scharff²

17
- 35949021744
- (1980) Rev. Mod. Phys. , vol.52 , pp. 121
- Ahlen¹

18
- 0002172392
- (1974) Phys. Rev. , vol.10 B , pp. 1
- Dettmann¹ Robinson²

19
- 0041186559
- (1988) Phys. Rev. , vol.38 B , pp. 6107
- Khait¹ Brener² Berserman³

20
- 0010075553
- (1990) Semicond. Sci. Technol. , vol.5 , pp. 1007
- Raineri¹ Galvagno² Rimini³ La Ferla⁴ Capizzi⁵ Carnera⁶ Ferla⁷

21
- 0024606819
- (1989) Mater. Sci. Eng. , vol.2 B , pp. 139
- Schreutelkamp¹ Saris² Westendorp³ Kaim⁴ Odlum⁵ Janssen⁶

22
- 0024607618
- (1989) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms , vol.37-38 B , pp. 357
- Westendorp¹ Kaim² Odlum³ Schreutelkamp⁴ Saris⁵ Janssen⁶

23
- 0040716926
- (1991) Nucl. Instr. and Meth. , vol.55 B , pp. 615
- Schreutelkamp¹ Raineri² Saris³ Kaim⁴ Westendorp⁵ van der Meulen⁶ Janssen⁷

24
- 0025418368
- (1990) IEEE Tras. Electron Devices , vol.37 , pp. 1052
- Kakoschke¹ Kaim² van der Meulen³ Westendorp⁴

25
- 5844328899
- (1991) Nucl. Instr. and Meth. , vol.55 B , pp. 661
- Raineri¹ Galvagno² Rimini³ La Ferla⁴ Capizzi⁵ Carnera⁶ Ferla⁷

26
- 4243344101
- (1991) Phys. Rev. , vol.44 B , pp. 10568
- Raineri¹ Setola² Priolo³ Rimini⁴ Galvagno⁵

27
- 11744305439
- (1991) Appl. Phys. Lett. , vol.58 , pp. 922
- Raineri¹ Schreutelkamp² Saris³ Janssen⁴ Kaim⁵

28
- 21544462510
- (1987) J. Appl. Phys. , vol.61 , pp. 1834
- Servidori¹ Angelucci² Cembali³ Negrini⁴ Solmi⁵ Zaumseil⁶ Winter⁷

29
- 0015646975
- (1973) J. Appl. Phys. , vol.44 , pp. 2951
- Reddi¹ Lensbury²

30
- 0001025545
- (1968) Canadian Journal of Physics , vol.46 , pp. 561
- Eisen¹

31
- 1342307236
- (1976) Nuclear Instruments and Methods , vol.132 , pp. 647
- Oen¹ Robinson²

32
- 0000827191
- (1963) Mat. Phys. Medd. Dan. Vik. Selsk. , vol.33 , pp. 1
- Lindhard¹ Scharff² Schiott³

33
- 0000827191
- (1964) Mat. Phys. Medd. Dan. Vik. Selsk. , vol.33 , pp. 14
- Lindhard¹ Scharff² Schiott³

34
- 0000235265
- (1980) Nuclear Instruments and Methods , vol.174 , pp. 257
- Biersack¹ Haggmark²

35
- 0003412161
- Pergamon Press, New York
- (1985) Stopping and Ranges of ions in solids
- Ziegler¹ Biersack² Littman³

36
- 4244028852
- (1992) Nucl. Instr. and Meth. , vol.62 B , pp. 356
- Gasparotto¹ Carnera² Acco³ La Ferla⁴

37
- 0019035990
- (1980) Journal of Applied Physics , vol.51 , pp. 3697
- Cones¹ Wilson²

38
- 0038479906
- (1976) Appl. Phys. Lett. , vol.29 , pp. 770
- Wilson¹

39
- 2442589283
- Springer, Berlin
- (1983) Ion Implantation Equipment and Techniques , pp. 126
- Turner¹

40
- 2442589283
- Springer, Berlin
- (1983) Ion Implantation Equipment and Techniques , pp. 155
- Armstrong¹ Benveriste² Forley³ Ryding⁴

41
- 84911316751
- (1991) Nucl. Instr. and Meth. , vol.55 B , pp. 234
- Park¹ Klein² Tash³ Simonton⁴ Novak⁵

42
- 0041497039
- (1991) Nucl. Instr. and Meth. , vol.55 B , pp. 39
- Simonton¹ Kamenitza² Ray³ Park⁴ Klein⁵ Tasch⁶

43
- 0042115189
- (1992) Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures , vol.10 B , pp. 353
- Dowsett¹ Cooke²

44
- 0025432938
- (1990) J. Electrochem. Soc. , vol.137 , pp. 1573
- Subrahmanyan¹ Massoud² Fair³

45
- 21544450078
- (1991) Appl. Phys. Lett. , vol.58 , pp. 2288
- Takigami¹ Tanimoto²

46
- 84911343905
- (1992) Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures , vol.10 B , pp. 496
- Kordic¹ van Loenen² Walker³

47
- 0009853439
- (1992) Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures , vol.10 , pp. 491
- Cerva¹

48
- 84911305136
- V. Privitera, W. Vandervost and T. Clarysse, J. Electrochem. Soc. (in press).

49
- 3042915770
- (1992) Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures , vol.10 B , pp. 449
- Vandervost¹ Clarysse² Vanhellemont³ Romano-Rodriguez⁴

50
- 0026927514
- (1992) Microel. Eng. , vol.19 , pp. 593
- Privitera¹ Raineri² Rimini³

51
- 22244461250
- (1992) Appl. Phys. Lett. , vol.61 , pp. 1190
- Raineri¹ Privitera² Rimini³

52
- 84911299914
- in press.
- (1993) J. Appl. Phys.
- Privitera¹ Raineri² Rimini³

53
- 0000699238
- (1972) Japanese Journal of Applied Physics , vol.11 , pp. 134
- Furukawa¹ Matsumura² Ishiwara³

54
- 0017458437
- (1977) Phys. Stat. Sol. , vol.39 a , pp. 595
- Runge¹

55
- 0022790635
- (1986) IEEE Trans. CAD , vol.5 , pp. 679
- Giles¹

56
- 0016414211
- (1976) Nuclear Instruments and Methods , vol.132 , pp. 641
- Hov¹ Robinson²

57
- 84911303585
- Radiation Effects and Defects in Solids
- Berlin, in press
- (1992) presented at COSIRES 92 (Computer Simulations of Radiation Effects in Solid)
- Posselt¹

58
- 0003716920
- Academic, New York
- (1985) Solid State Physics
- Burns¹

59
- 0000235265
- (1980) Nuclear Instruments and Methods , vol.174 , pp. 647
- Biersack¹ Haggmark²

60
- 0041133024
- (1992) Phys. Lett. , vol.163 A , pp. 439
- Grande¹ Schiwietz²

61
- 0025207696
- (1990) IEEE Electron device Lett. , vol.11 , pp. 42
- Crandle¹ Mulvaney²

62
- 0010410049
- (1987) J. Appl. Phys. , vol.62 , pp. 2733
- Kang¹ Shimizu² Saito³ Yamakawa⁴

63
- 84911338242
- K. Klein, C. Park and A. Tasch, 1990 IEDM Tech. Dig. 745.

64
- 0039530140
- (1990) Appl. Phys. Lett. , vol.57 , pp. 2701
- Klein¹ Park² Tasch³

65
- 44949271077
- (1991) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms , vol.59 B , pp. 60
- Klein¹ Park² Tasch³

66
- 84911306962
- Presented at Ion Beam Modification of Materials
- Heidelberg, 3rd ed., in press on
- (1992) Nucl. Instr. and Meth.
- Jaraiz¹ Arias² Rubio³ Bailon⁴ Boroldo⁵

67
- 0006420115
- (1987) J. Appl. Phys. , vol.62 , pp. 1723
- Servidori¹ Sourek² Solmi³

68
- 0026206580
- (1991) Mater. Sci. Rept. , vol.6 , pp. 275
- Schreutelkamp¹ Custer² Liefting³ Lu⁴ Saris⁵

69
- 84911290813
- V. Raineri, R.J. Schreutelkamp, F.W. Saris, R.E. Kaim, K.T.F. Janssen, Nucl. Instr. Meth. B59/60 1056.

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