Influence of Ar Metastable on the Discharge Structure in Ar and N 2 Mixture in RF Discharges at 13.56 MHz

Japanese Journal of Applied Physics

Volumn 33, Issue 7S, 1994, Pages 4271-

  Tochikubo, Fumiyoshi ^a   Makabe, Toshiaki ^a  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC CURRENTS; ELECTRON ENERGY LEVELS; HIGH PRESSURE EFFECTS; IONIZATION; LIGHT EMISSION; MATHEMATICAL MODELS; MIXTURES; NITROGEN; PLASMA DENSITY; PLASMA DIAGNOSTICS; PLASMA STABILITY;

METASTABLE MEASUREMENT; OPTICAL EMISSION SPECTROSCOPY;

GLOW DISCHARGES;

EID: 0028461066     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.33.4271     Document Type: Article

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