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Volumn 33, Issue 7S, 1994, Pages 4254-
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A Study of the Sustaining Mechanism in an Inductively Coupled Plasma
a a a
a
KEIO UNIVERSITY
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL REACTORS;
CONTINUUM MECHANICS;
ELECTRIC FIELD EFFECTS;
ELECTRON ENERGY LEVELS;
ELECTRON TRANSPORT PROPERTIES;
IONIZATION;
MAGNETIC FIELD EFFECTS;
MATHEMATICAL MODELS;
PLASMA COLLISION PROCESSES;
RELAXATION PROCESSES;
INDUCTIVELY COUPLED PLASMA;
LARMOR MOTION;
RELAXATION CONTINUUM MODEL;
SUSTAINING MECHANISM;
PLASMAS;
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EID: 0028460614
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.33.4254 Document Type: Article |
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Times cited : (16)
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References (7)
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