A Conveyance System Using Air Flow Based on the Concept of Distributed Micro Motion Systems

Journal of Microelectromechanical Systems

Volumn 3, Issue 2, 1994, Pages 54-58

  Konishi, Satoshi ^a   Fujita, Hiroyuki ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FLOW OF FLUIDS; MACHINING; MICROELECTRONIC PROCESSING; NOZZLES;

AIR FLOW; CONVEYANCE SYSTEM; MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0028449490     PISSN: 10577157     EISSN: 19410158     Source Type: Journal    
DOI: 10.1109/84.294321     Document Type: Article

References (10)

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