DLC film deposition by Laser-Arc and study of properties

Thin Solid Films

Volumn 246, Issue 1-2, 1994, Pages 92-102

  Scheibe, H J ^a   Schultrich, B ^a  

^a Fraunhofer Einrichtung für Werkstoffphysik und Schichttechnologie ^*  (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; AMORPHOUS FILMS; COATING TECHNIQUES; ELASTICITY; ELECTRIC ARCS; FILM PREPARATION; LASER APPLICATIONS; LIGHT ABSORPTION; OPTICAL PROPERTIES; SUBSTRATES; THERMAL EFFECTS; VAPOR DEPOSITION;

DIAMOND LIKE CARBON; LASER ARC; PULSED ARC PLASMA SOURCE; PULSED LASER DEPOSITION; VACUUM ARC DEPOSITION;

CARBON;

EID: 0028449481     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(94)90737-4     Document Type: Article

References (47)

1. Thin Film Diamond Growth Mechanisms [and Comment]
2. Ion Beam and Ion-Assisted Deposition of Diamond-Like Carbon Films
3. 3) Film Growth from Mass Selected Ion Beams: Parametric Investigations and Subplantation Model
4. Amorphous Hydrogenated Carbon (a-C:H)for Optical, Electrical and Mechanical Applications
5. Characterization of chemical bonding and physical characteristics of diamond-like amorphous carbon and diamond films
6. Elastic Surface Waves Guided by Thin Films
7. The effect of deposition conditions on carbon films prepared by laser ablation