메뉴 건너뛰기




Volumn 41, Issue 6, 1994, Pages 936-940

Bipolar Stressing, Breakdown, and Trap Generation in Thin Silicon Oxides

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN OF SOLIDS; ELECTRIC CHARGE; INTERFACES (MATERIALS); SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MODELS; SILICA; STRESSES;

EID: 0028444966     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.293305     Document Type: Article
Times cited : (34)

References (19)
  • 1
    • 0022957162 scopus 로고
    • Degradation of very thin gate oxide MOS devices under dynamic high field/current stress
    • M.-S. Liang, S. Haddad, W. Cox, and S. Cagnina, “Degradation of very thin gate oxide MOS devices under dynamic high field/current stress,” IEDM Dig. Techn. Papers, p. 394, 1986.
    • (1986) IEDM Dig. Techn. Papers , pp. 394
    • Liang, M.-S.1    Haddad, S.2    Cox, W.3    Cagnina, S.4
  • 3
    • 0026915066 scopus 로고
    • Anomalous breakdown behavior in ultrathin oxides and oxynitrides under dynamic electrical stress
    • H. Hwang and J. Lee, “Anomalous breakdown behavior in ultrathin oxides and oxynitrides under dynamic electrical stress,” IEEE Electron Device Lett. vol. 13, p. 485, 1992.
    • (1992) IEEE Electron Device Lett. , vol.13 , pp. 485
    • Hwang, H.1    Lee, J.2
  • 4
    • 0026938311 scopus 로고
    • Time-dependent dielectric breakdown characteristics of N2O oxide under dynamic stressing
    • J. Ahn, A. Joshi, G. Q. Lo, and D.-L. Kwong, “Time-dependent dielectric breakdown characteristics of N2O oxide under dynamic stressing,” IEEE Electron Device Lett. vol. 13, p. 513, 1992.
    • (1992) IEEE Electron Device Lett. , vol.13 , pp. 513
    • Ahn, J.1    Joshi, A.2    Lo, G.Q.3    Kwong, D.-L.4
  • 5
    • 0026169486 scopus 로고
    • High-frequency time-dependent breakdown of SiO2
    • E. Rosenbaum and C. Hu, “High-frequency time-dependent breakdown of SiO2,” IEEE Electron Device Lett., vol. 12, p. 267, 1991.
    • (1991) IEEE Electron Device Lett. , vol.12 , pp. 267
    • Rosenbaum, E.1    Hu, C.2
  • 6
    • 0027811720 scopus 로고
    • Silicon dioxide breakdown lifetime enhancement under bipolar bias conditions
    • E. Rosenbaum, Z. Liu, and C. Hu, “Silicon dioxide breakdown lifetime enhancement under bipolar bias conditions,” IEEE Trans. Electron Devices, vol. 40, p. 2287, 1993.
    • (1993) IEEE Trans. Electron Devices , vol.40 , pp. 2287
    • Rosenbaum, E.1    Liu, Z.2    Hu, C.3
  • 8
    • 0042035020 scopus 로고
    • Conduction and trapping of electrons in highly stressed ultrathin films of thermal SiO2
    • E Harari, “Conduction and trapping of electrons in highly stressed ultrathin films of thermal SiO2,” Appl. Phys. Lett. vol. 30, p. 601, 1977.
    • (1977) Appl. Phys. Lett. , vol.30 , pp. 601
    • Harari, E.1
  • 9
    • 0017960299 scopus 로고
    • Dielectric breakdown in electrically stressed thin films of thermal SiO2
    • E. Harari, “Dielectric breakdown in electrically stressed thin films of thermal SiO2,” J. Appl. Phys. vol. 49, p. 2478, 1978.
    • (1978) J. Appl. Phys. , vol.49 , pp. 2478
    • Harari, E.1
  • 10
    • 0000143442 scopus 로고
    • Degradation and breakdown of silicon dioxide films on silicon
    • D. J. DiMaria, D. Arnold, and E. Cartier, “Degradation and breakdown of silicon dioxide films on silicon,” Appl. Phys: Lett., vol. 61, p. 2329, 1992.
    • (1992) Appl. Phys: Lett. , vol.61 , pp. 2329
    • DiMaria, D.J.1    Arnold, D.2    Cartier, E.3
  • 13
    • 0024057331 scopus 로고
    • Stress voltage polarity dependence of thermally grown thin gate oxide wearout
    • Y. Hokari, “Stress voltage polarity dependence of thermally grown thin gate oxide wearout,” IEEE Trans. Electron Devices, vol. 35, p. 1299, 1988.
    • (1988) IEEE Trans. Electron Devices , vol.35 , pp. 1299
    • Hokari, Y.1
  • 14
    • 0027222479 scopus 로고
    • Effects of iron contamination on thin oxide breakdown and reliability characteristics
    • W. B. Henley, L. Jastrzebski, and N. F. Haddad, “Effects of iron contamination on thin oxide breakdown and reliability characteristics,” 31st Annu. Proc. Reliability Phys., vol. 22, 1993.
    • (1993) 31st Annu. Proc. Reliability Phys. , vol.22
    • Henley, W.B.1    Jastrzebski, L.2    Haddad, N.F.3
  • 15
    • 0027592414 scopus 로고
    • Correlation of stress-induced leakage current in thin oxides with trap generation inside the oxides
    • D. J. Dumin and J. R. Maddux, “Correlation of stress-induced leakage current in thin oxides with trap generation inside the oxides,” IEEE Trans. Electron Devices vol. 40, p. 986, 1993.
    • (1993) IEEE Trans. Electron Devices , vol.40 , pp. 986
    • Dumin, D.J.1    Maddux, J.R.2
  • 17
    • 0027270635 scopus 로고
    • A model relating wearout induced physical changes in thin oxides to the statistical description of breakdown
    • D. J. Dumin, R. S. Scott, and R. Subramoniam, “A model relating wearout induced physical changes in thin oxides to the statistical description of breakdown,” 31st Annu. Proc. Reliability Phys., p. 285, 1993.
    • (1993) 31st Annu. Proc. Reliability Phys. , pp. 285
    • Dumin, D.J.1    Scott, R.S.2    Subramoniam, R.3
  • 18
    • 0027802690 scopus 로고
    • Transient flat-band voltage shifts following high voltage stressing of thin oxides
    • D.-P. Wong and D. J. Dumin, “Transient flat-band voltage shifts following high voltage stressing of thin oxides,” Mat. Res. Society Symp. Proc., p. 284; Amorphous Insulating Thin Films, J. Kanicki, W. L. Warren, R. A. B. Devine and M. Matsumura, Eds. p. 235, 1993.
    • (1993) Mat. Res. Society Symp. Proc. , pp. 235
    • Wong, D.-P.1    Dumin, D.J.2
  • 19
    • 0026929049 scopus 로고
    • The impact of Si/Si02 interface asperities on breakdown characteristics of thin gate oxides
    • M. C. V. Lopes arid C. M- Hasenack, “The impact of Si/Si02 interface asperities on breakdown characteristics of thin gate oxides,” J. Electrochem. Soc. vol 139, p. 2909 1992.
    • (1992) J. Electrochem. Soc. , vol.139
    • Lopes arid, M.C.V.1    Hasenack, C. M-2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.