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Volumn 67, Issue 3, 1994, Pages 439-461
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The determination of depth profiles from angle-dependent XPS using maximum entropy data analysis
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
DATA REDUCTION;
DATA STRUCTURES;
PROBABILITY;
STATISTICAL METHODS;
X RAY SPECTROSCOPY;
ELEMENTAL DEPTH PROFILES;
LOGARITHMIC PROBABILITY FUNCTION;
MAXIMUM ENTROPY;
PHOTOELECTRON SPECTROSCOPY;
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EID: 0028444677
PISSN: 03682048
EISSN: None
Source Type: Journal
DOI: 10.1016/0368-2048(93)02035-K Document Type: Article |
Times cited : (71)
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References (39)
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