Cross Section Measurements for Electron-Impact Dissociation of C H F 3 into Neutral and Ionic Radicals

Japanese Journal of Applied Physics

Volumn 33, Issue 6R, 1994, Pages 3602-

  Goto, Masashi ^a   Nakamura, Keiji ^a   Toyoda, Hirotaka ^a   Sugai, Hideo ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Dissociation cross section; Electron impact; Ionization cross section; Neutral radical; Trifluoromethane

Indexed keywords

DISSOCIATION; ELECTRON BEAMS; IONIZATION; IONIZATION CHAMBERS; IONS; MASS SPECTROMETRY; NITROGEN;

CROSS SECTION MEASUREMENT; ELECTRON IMPACT DISSOCIATION; IONIC RADICAL; NEUTRAL RADICAL; TRIFLUOROMETHANE;

FLUOROCARBONS;

EID: 0028442525     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.33.3602     Document Type: Article

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