Passive Integrated-Optical Waveguide Structures by Ge-Diffusion in Silicon

Journal of Lightwave Technology

Volumn 12, Issue 5, 1994, Pages 842-848

  Schmidtchen, Joachim ^a   Schuppert, Bernd ^a   Petermann, Klaus ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CIRCUIT THEORY; DIFFUSION IN SOLIDS; GERMANIUM; INTEGRATED OPTICS; LITHOGRAPHY; PASSIVE NETWORKS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES; WAVEGUIDE COUPLERS;

GERMANIUM DIFFUSION IN SILICON; PASSIVE INTEGRATED OPTICAL WAVEGUIDE STRUCTURES; S BENDS;

OPTICAL WAVEGUIDES;

EID: 0028427974     PISSN: 07338724     EISSN: 15582213     Source Type: Journal    
DOI: 10.1109/50.293976     Document Type: Article

References (25)

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