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Volumn 41, Issue 5, 1994, Pages 800-808

Comparison of Ultralow Specific On-Resistance UMOSFET Structures: The ACCUFET, EXTFET, INVFET. and Conventional UMOSFET's

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC CURRENTS; ELECTRIC RESISTANCE; FIELD EFFECT TRANSISTORS; GATES (TRANSISTOR); MOSFET DEVICES; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR JUNCTIONS;

EID: 0028427219     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.285034     Document Type: Article
Times cited : (32)

References (15)
  • 1
    • 0004286686 scopus 로고
    • Modern Power Devices
    • B. J. Baliga, Modern Power Devices. New York: Wiley, 1987.
    • (1987)
    • Baliga, B.J.1
  • 3
    • 0023330527 scopus 로고
    • An ultralow on-resistance power MOSFET fabricated by using a fully self-aligned process
    • D. Ueda, H. Takagi, and G. Kano, “An ultralow on-resistance power MOSFET fabricated by using a fully self-aligned process,” IEEE Trans. Electron Devices, vol. ED-34, pp. 926–930, 1987.
    • (1987) IEEE Trans. Electron Devices , vol.ED-34 , pp. 926-930
    • Ueda, D.1    Takagi, H.2    Kano, G.3
  • 6
    • 0024629947 scopus 로고
    • Numerical and experimental comparison of 60 V vertical double-diffused MOSFETs and MOSFETs with a trench-gate structure
    • H.-R. Chang, “Numerical and experimental comparison of 60 V vertical double-diffused MOSFETs and MOSFETs with a trench-gate structure,” Solid-State Electronics, vol. 32, pp. 247–251, 1989.
    • (1989) Solid-State Electronics , vol.32 , pp. 247-251
    • Chang, H.-R.1
  • 8
    • 0026158322 scopus 로고
    • Trench DMOS transistor technology for high-current (100 A range) switching
    • C. Bulucea and R. Rossen, “Trench DMOS transistor technology for high-current (100 A range) switching,” Solid State Electronics, vol. 34, pp. 493–507, 1991.
    • (1991) Solid State Electronics , vol.34 , pp. 493-507
    • Bulucea, C.1    Rossen, R.2
  • 9
    • 0026202239 scopus 로고
    • Ultralow specific on resistance UMOSFET with trench contacts for source and body regions realized by selfaligned process
    • S. Matsumoto, T. Ohno, and K. Izumi, “Ultralow specific on resistance UMOSFET with trench contacts for source and body regions realized by selfaligned process,” Electron. Lett., vol. 27, pp. 1640–1642, 1991.
    • (1991) Electron. Lett. , vol.27 , pp. 1640-1642
    • Matsumoto, S.1    Ohno, T.2    Izumi, K.3
  • 12
    • 84946244439 scopus 로고
    • Two-dimensional device analysis program
    • TMA PISCES-2B Version 9033
    • TMA PISCES-2B, “Two-dimensional device analysis program,” Version 9033, 1990, Technology Modeling Associates, Inc.
    • (1990) Technology Modeling Associates, Inc
  • 13
    • 0026238437 scopus 로고
    • Reactive ion etching of silicon trenches using SF6/O2gas mixtures, J. Electrochem. Soc., vol. 138, pp. 3076–3081, 1991
    • T. Syau, B. J. Baliga, and R. W. Hamaker, “Reactive ion etching of silicon trenches using SF6/O2gas mixtures, J. Electrochem. Soc., vol. 138, pp. 3076–3081, 1991.
    • (1991) , vol.138 , pp. 3076-3081
    • Syau, T.1    Baliga, B.J.2    Hamaker, R.W.3
  • 14
    • 84946243801 scopus 로고
    • Mobility study on RIE etched silicon surfaces using sf6/o2 gas etchants
    • T. Syau and B. J. Baliga, “Mobility study on RIE etched silicon surfaces using sf6/o2 gas etchants,” submitted for publication, 1992.
    • (1992) submitted for publication
    • Syau, T.1    Baliga, B.J.2
  • 15
    • 0026908575 scopus 로고
    • The accumulation mode field-effect transistor: A new ultralow on-resistance MOSFET
    • B. J. Baliga, T. Syau, and P. Venkatraman, “The accumulation mode field-effect transistor: A new ultralow on-resistance MOSFET,” IEEE Electron Device Lett., vol. 13, pp. 427–429, 1992.
    • (1992) IEEE Electron Device Lett. , vol.13 , pp. 427-429
    • Baliga, B.J.1    Syau, T.2    Venkatraman, P.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.