A fluxgate magnetic sensor with micro-solenoids and electroplated permalloy cores

Sensors and Actuators: A. Physical

Volumn 43, Issue 1-3, 1994, Pages 128-134

  Kawahito, S ^a   Sasaki, Y ^a   Sato, H ^a   Nakamura, T ^a   Tadokoro, Y ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; MAGNETIC CORES; SEMICONDUCTING SILICON; SENSORS; SOLENOIDS;

FLUXGATE MAGNETIC SENSORS; PERMALLOY;

MAGNETIC VARIABLES MEASUREMENT;

EID: 0028425009     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(93)00679-X     Document Type: Article

References (9)

1. Fluxgate sensor in planar microtechnology
2. Core losses of sputtered supermalloy multilayered core over 1 MHz
3. Thin film cloth-structured inductor for magnetic integrated circuit
4. An electrodeposited cylindrical magnetometer sensor