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Diamond and Related Materials

Volumn 3, Issue 4-6, 1994, Pages 341-345

Mechanisms in ion induced c-BN growth

(3) Reinke, S a Kuhr, M a Kulisch, W a

a UNIVERSITY OF KASSEL (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DESORPTION; FILM GROWTH; ION BEAMS; MATHEMATICAL MODELS; SPUTTER DEPOSITION; THERMAL EFFECTS;

ION BEAM ASSISTED DEPOSITION;

CUBIC BORON NITRIDE;

EID: 0028419960 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/0925-9635(94)90183-X Document Type: Article

Times cited : (74)

References (28)

1
- 36448999062
- (1992) J. Appl. Phys. , vol.72 , pp. 504
- Kester¹ Messier²

2
- 21544450373
- (1992) Diamond Relat. Mater. , vol.1 , pp. 883
- Tanabe¹ Hayashi² Iwaki³

3
- 50749133838
- (1992) Diamond Relat. Mater. , vol.1 , pp. 151
- Tanabe¹ Hayashi² Iwaki³

4
- 84914805640
- Antibes, SocietéFrancaise du Vide
- (1993) paper presented at 9th Int. Colloq. on Plasma Processes (CIP93)
- Djouadi¹ Bouchier² Möller³ Sene⁴

5
- 0027591067
- (1993) Thin Solid Films , vol.228 , pp. 97
- Sueda¹ Kobayashi² Tsukamoto³ Rokkaku⁴ Morimoto⁵ Fukaya⁶ Yamashita⁷ Wada⁸

6
- 0026360766
- (1991) Surf. Coat. Technol. , vol.50 , pp. 33
- Ikeda¹ Satou² Satoh³

7
- 0024921257
- (1989) Surf. Coat. Technol. , vol.39-40 , pp. 253
- Inagawa¹ Watanabe² Saitoh³ Yuchi⁴ Itoh⁵

8
- 0025701290
- (1990) Surf. Coat. Technol. , vol.43-44 , pp. 128
- Murakawa¹ Watanabe²

9
- 0026839168
- (1992) Surf. Coat. Technol. , vol.52 , pp. 87
- Mieno¹ Yoshida²

10
- 0027588969
- (1993) Diamond Relat. Mater. , vol.2 , pp. 1206
- Bewilogua¹ Buth² Hübsch³ Grischke⁴

11
- 0027565782
- (1993) Diamond Relat. Mater. , vol.2 , pp. 201
- Weber¹ Bringmann² Nikulski³ Klages⁴

12
- 0026108741
- (1991) Jpn. J. Appl. Phys. , vol.30 , pp. 344
- Yokoyama¹ Okamoto² Osaka³

13
- 0028419470
- (1994) Diamond Relat. Mater. , vol.3 , pp. 337
- Dworschak¹ Jung² Ehrhardt³

14
- 0001440033
- Characterization of BN Thin Films Deposited by Plasma CVD
- (1990) Materials Science Forum , vol.54-55 , pp. 277
- Osaka¹ Chayahara² Yokoyama³ Hamada⁴ Imura⁵ Fujisawa⁶

15
- 84914797701
- Honolulu, HI, The Electrochemical Society, Pennington, NJ
- (1993) Proc. 3rd Int. Symp. on Diamond Materials
- Reinke¹ Kuhr² Beckmann³ Kulisch⁴ Kassing⁵

16
- 84914766008
- D. Bouchier, personal communication, 1993.

17
- 0347687157
- Formation of cBN films by ion beam assisted deposition
- (1992) Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films , vol.10 , pp. 515
- Wada¹ Yamashita²

18
- 84914806271
- R. Behrisch, Springer, Berlin, Chapter 4
- (1981) Sputtering by Particle Bombardment , vol.1 , pp. 1660
- Wehner¹

19
- 33751416523
- (1984) Atomic Data Nucl. Data Tables , vol.31 , pp. 1
- Matsunami¹ Yamamura² Itikawa³ Itoh⁴ Kazumata⁵ Miyagawa⁶ Morita⁷ Shimizu⁸ Tawara⁹

20
- 84914764972
- J. Harry
- (1993) Proc. 11th Int. Symp. on Plasma Chemistry, Loughborough , vol.3 , pp. 1041
- Weber¹ Bringmann² Nikulski³ Klages⁴

21
- 84914765873
- R. Behrisch, Springer, Berlin, Chapter 2
- (1981) Sputtering by Particle Bombardment , vol.1 , pp. 90
- Sigmund¹

22
- 0000784758
- (1962) J. Appl. Phys. , vol.33 , pp. 1842
- Rosenberg¹ Wehner²

23
- 0001680683
- Effects of Ar ion beam bombardment on the formation of cubic BN in IBED
- (1993) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms , vol.80-81 B , pp. 1349
- Tanabe¹ Iwaki²

24
- 84914768271
- W. Dworschak, personal communication, 1993.

25
- 0043059594
- (1993) Diamond Relat. Mater. , vol.2 , pp. 984
- Robertson¹

26
- 0026208238
- (1991) Diamond Relat. Mater. , vol.1 , pp. 51
- McKenzie¹ Müller² Pailthorpe³ Wang⁴ Kravtchinskaia⁵ Segal⁶ Lukins⁷ Swift⁸ Martin⁹ Amaratunga¹⁰ Gaskell¹¹ Saeed¹²

27
- 21544477583
- (1993) Diamond Relat. Mater. , vol.2 , pp. 970
- McKenzie¹ McFall² Sainty³ Davis⁴ Collins⁵

28
- 84914794766
- (1993) J. Mater. Res. , vol.8
- Kester¹ Ailey² Davis³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.