메뉴 건너뛰기




Volumn 41, Issue 4, 1994, Pages 618-620

SiC MOS Interface Characteristics

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; DIELECTRIC MATERIALS; GATES (TRANSISTOR); INTERFACES (MATERIALS); SEMICONDUCTOR GROWTH; SILICA; SILICON CARBIDE; SUBSTRATES; THERMAL EFFECTS; THERMOOXIDATION;

EID: 0028413989     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.278521     Document Type: Article
Times cited : (62)

References (9)
  • 2
    • 21544441547 scopus 로고    scopus 로고
    • Characterization of device parameters in high temperature metal-oxide semiconductor field-effect transistors in B-SiC thin films
    • J. Palmour, H. S. King, and R. F. Davis, “Characterization of device parameters in high temperature metal-oxide semiconductor field-effect transistors in B-SiC thin films,” J. Appl. Physics, vol. 64, pp. 2168-2177.
    • J. Appl. Physics , vol.64 , pp. 2168-2177
    • Palmour, J.1    King, H.S.2    Davis, R.F.3
  • 4
    • 84949620841 scopus 로고    scopus 로고
    • Fabrication of MOSFETS on beta-SiC single crystalline layers grown on Si (100) substrates
    • Springer Proc. Physics M. Rahman, C. Y.-W. Yang and G. Harris, Ed.
    • H. Fuma, A. Miura, H. Tadano, S. Sugiyama, and M. Takigawa, “Fabrication of MOSFETS on beta-SiC single crystalline layers grown on Si (100) substrates,” Amorphous and Crystalline Silicon Carbide II, Springer Proc. Physics No. 43, M. Rahman, C. Y.-W. Yang and G. Harris, Ed.
    • Amorphous and Crystalline Silicon Carbide II , Issue.43
    • Fuma, H.1    Miura, A.2    Tadano, H.3    Sugiyama, S.4    Takigawa, M.5
  • 5
  • 7
    • 0008571870 scopus 로고
    • Si-SiO2 interface state measurements
    • D. M. Brown and P. V. Gray, “Si-SiO2 interface state measurements,” J. Electrochem. Soc., vol. 115, no. 7, 1988, pp. 760-766 and “Density of SiO2-Si interface states,” Applied Phys. Lett., vol. 8, no. 2, 1966, pp. 31-33.
    • (1966) J. Electrochem. Soc. , vol.115 , Issue.7 , pp. 760-766
    • Brown, D.M.1    Gray, P.V.2
  • 8
    • 0024607323 scopus 로고
    • Dopant redistribution during thermal oxidation of monocrystalline beta-SiC thin films
    • Feb.
    • J. W. Palmour, R. F. Davis, H. S. Kong, S. F. Corcoran and D. P. Griffis, “Dopant redistribution during thermal oxidation of monocrystalline beta-SiC thin films,” J. Electrochem. Soc., vol. 136, no. 2, Feb. 1989, pp. 502-507.
    • (1989) J. Electrochem. Soc. , vol.136 , Issue.2 , pp. 502-507
    • Palmour, J.W.1    Davis, R.F.2    Kong, H.S.3    Corcoran, S.F.4    Griffis, D.P.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.