Improved surface smoothness of yba2cu3oy films and related multilayers by arf excimer laser deposition with shadow mask “eclipse method”

Japanese Journal of Applied Physics

Volumn 33, Issue 3, 1994, Pages L417-L420

  Klnoshlta, Kazuya ^a   Ishibashi, Hiroshige ^a   Kobayashi, Takeshi ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Excimer laser; Ferro electric; Oxide superconductor; Thin film

Indexed keywords

DEPOSITION; EXCIMER LASERS; FERROELECTRIC MATERIALS; FILM GROWTH; HIGH TEMPERATURE SUPERCONDUCTORS; LASER PULSES; PHOTONS; YTTRIUM COMPOUNDS;

ECLIPSE METHOD; EXCIMER LASER ABLATION; EXCIMER LASER DEPOSITION; HIGH ENERGY PHOTONS; METAL INSULATOR SUPERCONDUCTOR; PULSED LASER DEPOSITION; SHADOW MASK;

SUPERCONDUCTING FILMS;

EID: 0028403180     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.33.L417     Document Type: Article

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