Microstructure technology for fabrication of metal-mesh grids

Applied Optics

Volumn 33, Issue 7, 1994, Pages 1286-1292

  Rebbert, Milton ^d   Isaacson, Peter ^d   Fischer, Jacqueline ^c   Greenhouse, Matthew A ^a,c   Grossman, Julius ^b,c   Peckerar, Martin ^d   Smith, Howard A ^a,c  

^a SMITHSONIAN INSTITUTION   (United States)

^b SFA INC   (United States)

^c NAVAL RESEARCH LABORATORY   (United States)

^d Electronics Science and Technology Division ^*  (United States)

Author keywords

Fabry Perot; Far infrared; Metal mesh; Microstructure technology

Indexed keywords

FABRICATION; FABRY-PEROT INTERFEROMETERS; MICROSTRUCTURE; MIRRORS; OPTICAL DEVICES;

MESH FLATNESS; METAL MESH GRIDS; WIRE WIDTHS;

PHOTOLITHOGRAPHY;

EID: 0028402561     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.33.001286     Document Type: Article

References (12)

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