Laser stimulated photocathode electron beam prober for 15ps resolution waveform measurements

Microelectronic Engineering

Volumn 24, Issue 1-4, 1994, Pages 81-88

  Fixl, Albert J ^a   Jenkins, Keith A ^b  

^a SCHLUMBERGER   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC VARIABLES MEASUREMENT; ELECTRIC WAVEFORMS; ELECTRON BEAMS; EMITTER COUPLED LOGIC CIRCUITS; LASER APPLICATIONS; LASER PULSES; NONDESTRUCTIVE EXAMINATION; PERFORMANCE; PHOTOCATHODES; PHOTOEMISSION; PROBES; SIGNAL TO NOISE RATIO;

BANDWIDTH LIMITATIONS; COMMUNICATION CIRCUIT; ELECTRON BEAM PROBE SYSTEMS; ELECTRON SAMPLING PULSES; LASER STIMULATED PHOTOEMISSION; RESOLUTION WAVEFORM MEASUREMENTS; RISE TIMES;

INTEGRATED CIRCUIT TESTING;

EID: 0028396438     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-9317(94)90057-4     Document Type: Article

References (5)

1. E-Beam Probing for VLSI Circuit Debug
2. Noncontact High-Speed Waveform Measurements with the Picosecond Photoelectron Scanning Electron Microscope
3. Transit Time Effect on Voltage Contrast in the Stroboscopic Scanning Electron Microscope
4. An Experimental 5-Gb/s 16×16 Si-Bipolar Cross-point Switch