Heat treatment of spun-on acid-catalyzed sol-gel silica films

Journal of Materials Research

Volumn 9, Issue 3, 1994, Pages 723-730

  Parrill, T M ^a  

^a IBM RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DENSIFICATION; ELLIPSOMETRY; FILM GROWTH; MOISTURE; POROSITY; REFRACTIVE INDEX; RELAXATION PROCESSES; SOL-GELS; STRAIN; STRESS ANALYSIS; THIN FILMS;

ACID CATALYZED SOL GEL SILICA FILMS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; SILANOL; SPIN COATING;

SILICA;

EID: 0028396379     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/JMR.1994.0723     Document Type: Article

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