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Volumn 30, Issue 7, 1994, Pages 603-604
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Measurement of plasma electron density generated by a semiconductor bridge (SCB)
a a a a |
Author keywords
Plasma diagnostic techniques; Silicon on insulator
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Indexed keywords
BRIDGE CIRCUITS;
ELECTRIC DISCHARGES;
MICROWAVE DEVICES;
PLASMA DIAGNOSTICS;
RESONATORS;
SEMICONDUCTOR DEVICE STRUCTURES;
SEMICONDUCTOR DEVICES;
SILICON ON INSULATOR TECHNOLOGY;
MICROWAVE RESONATOR PROBE;
PLASMA ELECTRON DENSITY MEASUREMENT;
SEMICONDUCTOR BRIDGE;
ELECTRON DENSITY MEASUREMENT;
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EID: 0028392108
PISSN: 00135194
EISSN: None
Source Type: Journal
DOI: 10.1049/el:19940380 Document Type: Article |
Times cited : (12)
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References (5)
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