Study of thermal oxidation and nitrogen annealing of luminescent porous silicon

Applied Physics Letters

Volumn 64, Issue 11, 1994, Pages 1374-1376

  Yan, J ^a   Shih, S ^a   Jung, K H ^a   Kwong, D L ^a   Kovar, M ^a   White, J M ^a   Gnade, B E ^b   Magel, L ^b  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMS; COMPOSITION; HYDROGEN; INFRARED SPECTROSCOPY; MASS SPECTROMETRY; NITROGEN; PHOTOLUMINESCENCE; POROUS MATERIALS; SPUTTERING; THERMODYNAMIC STABILITY; THERMOOXIDATION;

BONDING CONFIGURATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; SECONDARY ION MASS SPECTROSCOPY;

SILICON;

EID: 0028387095     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.111939     Document Type: Article

References (10)