Electrostatically excited and capacitively detected flexural plate waves on thin silicon nitride membranes with chemical sensor applications

Sensors and Actuators: B. Chemical

Volumn 18, Issue 1-3, 1994, Pages 103-106

  Giesler, T ^a   Meyer, J U ^a  

^a FRAUNHOFER INSTITUTE FOR BIOMEDICAL ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC WAVES; MEMBRANES; SIGNAL PROCESSING; SILICON NITRIDE; TRANSDUCERS;

CAPACITIVELY DETECTED; CHEMICAL SENSORS; ELECTROSTATICALLY EXCITED; FLEXURAL PLATE WAVES;

SENSORS;

EID: 0028386999     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-4005(94)87066-7     Document Type: Article

References (6)

1. Acoustic waveguides
2. Ultrasonic plate waves for biochemical measurements
3. Electrostatic excitation and capacitive detection of flexural plate-waves
4. Flexural plate-wave gravimetric chemical sensor
5. Fluid loading of a lamb-wave sensor