Incorporation of nitrogen into diamond-like carbon films

Diamond and Related Materials

Volumn 3, Issue 3, 1994, Pages 210-221

  Seth, Jayshree ^a   Padiyath, R ^a   Babu, S V ^a  

^a CLARKSON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; CARBON; COATING TECHNIQUES; FILMS; LASER APPLICATIONS;

DIAMOND LIKE CARBON (DLC); NITROGEN PLASMA AMBIENT; PLASMA PLUME;

DIAMONDS;

EID: 0028380948     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(94)90082-5     Document Type: Article

References (49)

1. Characterization of diamondlike carbon films and their application as overcoats on thin-film media for magnetic recording
2. Diamond and diamondlike films: Deposition processes and properties
3. rf-plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applications
4. EELS analysis of vacuum arc-deposited diamond-like films
5. Laser plasma source of amorphic diamond
6. Thin-film deposition by a new laser ablation and plasma hybrid technique
7. Energetic carbon deposition at oblique angles
8. Dense ‘‘diamondlike’’ hydrocarbons as random covalent networks
9. Influence of the deposition gas mixture on the structure and failure modes of diamondlike carbon films
10. Structure and bonding studies of the C:N thin films produced by rf sputtering method
11. Carbon-Nitrogen Pyrolyzates: Attempted Preparation of Carbon Nitride
12. Pyrolytic Deposition of Carbon Films Containing Nitrogen and/or Boron
13. Growth and characterization of C-N thin films
14. Electrical characteristics of plasma-deposited diamondlike carbon/silicon metal–insulator–semiconductor structures
15. Vapor deposition processes for amorphous carbon films with sp3 fractions approaching diamond