Monte Carlo simulation of ion implantation for three-dimensional structures using an octree

IEICE Transactions on Electronics

Volumn E77-C, Issue 2, 1994, Pages 118-123

  Stippel, Hannes ^a   Selberherr, Siegfried ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; CRYSTAL DEFECTS; ION IMPLANTATION; MONTE CARLO METHODS; SEMICONDUCTOR DEVICE MODELS; THREE DIMENSIONAL; TREES (MATHEMATICS);

OCTREE; POINT LOCATION; THREE DIMENSIONAL STRUCTURES;

SEMICONDUCTOR DEVICE STRUCTURES;

EID: 0028378042     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)