Accurate simulation of pattern transfer processes using Minkowski operations

IEICE Transactions on Electronics

Volumn E77-C, Issue 2, 1994, Pages 92-97

  Strasser, Ernst ^a   Schrom, Gerhard ^a   Wimmer, Karl ^a   Selberherr, Siegfried ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; DEPOSITION; ETCHING; IMAGE PROCESSING; MORPHOLOGY; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICE STRUCTURES; SURFACES;

CELL REMOVAL ALGORITHMS; MINKOWSKI OPERATIONS; PATTERN TRANSFER PROCESSES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0028374990     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)