Removal of dissolved oxygen in ultrapure water production using microporous membrane modules

Journal of Membrane Science

Volumn 87, Issue 1-2, 1994, Pages 99-105

  Tai, M S L ^a   Chua, Ivy ^a   Li, K ^a   Ng, W J ^a   Teo, W K ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

dissolved oxygen; microporous membranes; ultrapure water

Indexed keywords

MEMBRANES-SYNTHETIC; ULTRAPURE WATER; WATER TREATMENT;

GASES; INDUSTRIAL WATER TREATMENT; LIQUIDS; MASS TRANSFER; MATHEMATICAL MODELS; OXYGEN; POROUS MATERIALS; PURIFICATION; SURFACES;

DISSOLVED OXYGEN; GAS LIQUID CONTACTORS; LEVEQUE EQUATION; MICROPOROUS MEMBRANES; ULTRAPURE WATER;

MEMBRANES;

OXYGEN;

CONFERENCE PAPER; MEMBRANE; PRIORITY JOURNAL; WATER TREATMENT;

EID: 0028372565     PISSN: 03767388     EISSN: None     Source Type: Journal    
DOI: 10.1016/0376-7388(93)E0086-S     Document Type: Article

References (10)

1. Advanced D.I. water system with low dissolved oxygen for ULSI processing
2. Advanced ultrapure water systems for ULSI processing
3. Dissolved oxygen removal in ultrapure water for semiconductor processing
4. Designing hollow-fibre contactors
5. Other new membrane processes
6. The effect of shell side hydrodynamics on the performance of axial flow hollow fibre modules
7. Use of sealed end hollow fibres for bubbleless membrane aeration: experimental studies
8. Dispersion-free solvent extraction with microporous hollow-fibre modules
9. Mass transfer in various hollow fiber geometries