Hardness and Young‘s Modulus of Amorphous a-SiC thin Films Determined by Nanoindentation and Bulge Tests

Journal of Materials Research

Volumn 9, Issue 1, 1994, Pages 96-103

  El Khakani, M A ^a   Chaker, M ^a   Jean, A ^a   Boily, S ^a   Kieffer, J C ^a   O'Hern, M E ^b   Ravet, M F ^c   Rousseaux, F ^c  

^a INRS EMT   (Canada)

^b Nano Instruments Inc   (United States)

^c CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; ABSORPTION SPECTROSCOPY; AMORPHOUS FILMS; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; ELASTICITY; HARDNESS; HYDROGENATION; MECHANICAL TESTING; MICROSTRUCTURE; SPUTTER DEPOSITION; THIN FILMS;

BULGE TESTING; LASER ABLATION; NANOINDENTATION TESTING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TRIODE SPUTTERING DEPOSITION; YOUNG'S MODULUS;

SILICON CARBIDE;

EID: 0028320386     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/JMR.1994.0096     Document Type: Article

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